Spin Coater

Location: MEL 2228
Contact: Professor Nenad Miljkovic

Model: Midas Spin-1200T

Specification:

  • Substrate size: piece ~ up to 4” circle
  • Rotation speed: 300 ~ 10,000 rpm (@without load) an error of less than 1%
  • Spin state: 50 steps, 50 recipes (digital type)
  • Bowl size: 8”
  • Acceleration / Deceleration rate: Variable
  • Chuck material: Anodized AL, Acetal
  • Electric power: 220V, 5A
  • Oiless vacuum pump pressure: -650 mmHg
  • Dimensions (mm): 230 (D) x 340 (W) x 260 (H)

Use:

Spin coater is mainly used for spin coating liquid phase chemicals on various samples,  especially liquid phase hydrophobic (non-polar) chemicals such as Teflon and Poly-dimethylsiloxane (PDMS).