Ozone Cleaner

Location: MEL 2228
Contact: Professor Nenad Miljkovic

Novascan UV Ozone Cleaners have proven to be highly effective for non-acidic, dry, non-destructive atomic cleaning and removal of organic contaminants.

Novascan’s Ultraviolet UV Ozone Cleaners are highly published and widely used in industry, production and academics labs. Typical applications are:

  • UV Ozone Cleaning Quartz and Ceramic Surfaces, Semiconductor wafer; Atomically clean glass sides and coverslips
  • Improve surface wettability after UV Ozone cleaning
  • Enhance adhesion of paints, coatings, glues and adhesives
  • Make Hydrophobic surfaces more Hydrophilic
  • UV clean AFM probes / tips; UV Clean SEM & TEM samples
  • Remove and strip photoresist,
  • UV polymer activation, assembly / bonding of PDMS / glass microfluidic devices

An effective, non-destructive, non-vacuum alternative to plasma cleaning